Harmonic Devices Inc. is developing a CMOS-compatible MEMS contour mode resonator technology for filtering and clock synthesis.  The piezoelectric aluminum nitride technology allows for filters and clock-resonators from a few MHz to several GHz to be synthesized on a single, inexpensive silicon substrate.  The components offer smaller form factor and lower cost.

For filtering, the contour-mode technology is targeted towards replacing legacy surface acoustic wave (SAW) filters, dielectric resonator filters, and monolithic crystal filters.  Fractional bandwidths from 0.2 to 2% are achievable.  Because of the ability to define the frequency of operation at the CAD-level, Harmonic Devices can also synthesize high-performance, low-cost ultra-compact filter banks.

Harmonic Devices' resonators can be used to synthesize precision low-jitter clock references for consumer and military electronics.  These products offer a low-cost alternative to expensive surface acoustic wave (SAW) and quartz-crystal resonator solutions.  Harmonic Devices' resonators can be used for wireless electronics, serial-data applications, wireless remote controllers, portable phones, computing, automotive, and other communication applications.  Unlike other MEMS technologies, piezoelectric contour-mode resonators can function as a pin-for-pin replacement for legacy quartz and SAW crystals.  Harmonic Devices can also synthesize fundamental mode (lower jitter) multi-frequency sources that don’t require a PLL.

Harmonic Devices is based in Berkeley, CA